Optics and Precision Engineering, Volume. 14, Issue 5, 764(2006)
Experimental and theoretical study on laser cleaning Al2O3 particle on silicon wafer surface
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WU Dong-jiang, XU Yuan, WANG Xu-yue, KANG Ren-ke, SIMA Yuan, HU Li-zhong. Experimental and theoretical study on laser cleaning Al2O3 particle on silicon wafer surface[J]. Optics and Precision Engineering, 2006, 14(5): 764
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Received: Jan. 18, 2006
Accepted: --
Published Online: Feb. 28, 2010
The Author Email: Dong-jiang WU (djwudut@dlut.edu.cn)
CSTR:32186.14.
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