Accurate measurement of deflection of primary and secondary mirrors of large-aperture telescope

参数	值
X，Y向行程/重复精度	±50 mm/±0.5 μm
Z向行程/重复精度 θ_X，θ_Y，θ_Z向行程/重复精度	±25 m/±0.2 μm ±15°/±3 μrad
X，Y向负载 Z向负载	50 kg 20 kg
X，Y向上的刚性	7 N/μm
Z向上的刚性	100 N/μm

Table 2. Position offset test data

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Table 2. Position offset test data

俯仰角 /（°）	$d_{x_{1}}$	$d_{y_{1}}$	$d_{x_{2}}$	$d_{y_{2}}$	${\bar{d}}_{x}$	${\bar{d}}_{y}$
88	16	196	16	196	16	196
83	15	192	15	194	15	193
78	14	188	13	192	13.5	190
73	13	182	11	186	12	184
68	12	172	10	175	11	173.5
63	11	165	11	172	11	168.5
58	10	154	10	158	10	156
53	10	145	9	152	9.5	148.5
48	8	135	9	141	8.5	138
43	7	121	8	131	7.5	126
38	7	105	8	115	7.5	110
33	6	89	7	97	6.5	93
28	5	78	7	85	6	81.5
23	4	66	6	76	5	71
18	3	47	6	57	4.5	52
13	3	35	3	42	3	38.5
8	0	15	3	22	1.5	18.5
3	0	0	3	10	1.5	5

Table 3. Angular deflection test data

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Table 3. Angular deflection test data

俯仰角 /（°）	$r_{x_{1}}$	$r_{y_{1}}$	$r_{x_{2}}$	$r_{y_{2}}$	${\bar{r}}_{x}$	${\bar{r}}_{y}$
88	2.6	12.8	2.6	12.8	2.6	12.8
83	2.6	12.5	2.9	12.6	2.75	12.55
78	2.5	12.2	2.4	12.4	2.45	12.3
73	2.5	11.9	2.4	12.2	2.45	12.05
68	2.5	11.5	2.3	11.7	2.4	11.6
63	2.3	10.9	2.3	11.4	2.3	11.15
58	2.1	10.5	2.1	10.9	2.1	10.7
53	2	9.9	2	10.3	2	10.1
48	1.8	9.3	2	9.8	1.9	9.55
43	1.6	8.4	1.9	9.1	1.75	8.75
38	1.5	7.7	1.5	8.4	1.5	8.05
33	1.3	6.9	1.4	7.2	1.35	7.05
28	1	5.8	1.1	6.3	1.05	6.05
23	0.7	4.6	1	5.2	0.85	4.9
18	0.6	3.5	0.8	4.1	0.7	3.8
13	0.3	2.4	0.4	3.2	0.35	2.8
8	0.3	1.1	0	1.7	0.15	1.4
3	0	0	-0.2	1.1	-0.1	0.55

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Baogang CHEN, Jianli WANG, Yan ZHANG. Accurate measurement of deflection of primary and secondary mirrors of large-aperture telescope[J]. Optics and Precision Engineering, 2022, 30(23): 3013

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