[1] J LINHART. Research on thermophysical and optical properties of sapphire and other high-temperature oxides with assistance of an optical furnace. Journal of Synthetic Crystals, 34, 986-998(2005).

[2] T KONDO, T KITANO, A SUZUKI et al. Advantages of the moth-eye patterned sapphire substrate for the high performance nitride based LEDs. Physica Status Solidi （c）, 11, 771-774(2014).

[3] X H HUANG, J P LIU, Y M FAN et al. Improving InGaN-LED performance by optimizing the patterned sapphire substrate shape. Chinese Physics B, 21(2012).

[4] X M JIN, G CHAVOOR, G B LIU. Study of patterned sapphire substrate and SiO₂ array in GaN LED, 1055, 105541G(2018).

[5] A A MAZHEI, A A USPENSKIY, V G ERMALENOK. Dynamic analysis of the hydro-pneumatic front axle suspension of agriculture tractor(2006).

[6] Z X CAI, X Y GAO, W YANG et al. Study on fiber laser cutting of sapphire substrate. Laser & Optoelectronics Progress, 52(2015).

[7] X WANG, C D LU, D H WEN. Experimental study on the precision lapping of sapphire substrate. Advanced Materials Research, 215, 291-294(2011).

[8] S H YIN, Y Q WANG, Y P LI et al. Experimental study on magnetorheological chemical polishing for sapphire substrate. Journal of Mechanical Engineering, 52, 80-87(2016).

[9] K A LEE, O H KIM, E S LEE. Study on fabrication of a large concave mirror surface using a swing-arm type profilometer. Journal of the Korean Society of Manufacturing Process Engineers, 7, 41-46(2008).

[10] C H CHENG, S K HUNG, C H LIN. Design of a dual- probe profilometer, 66-69(2014).

[11] [11] 11徐晓明， 周海， 黄传锦， 等. 蓝宝石衬底基片表面平整加工工艺研究［J］. 机械设计与制造， 2018（6）： 236-238， 242. doi: 10.3969/j.issn.1001-3997.2018.06.063XUX M， ZHOUH， HUANGCH J， et al. Study on planarization process of sapphire substrate surface［J］. Machinery Design & Manufacture， 2018（6）： 236-238， 242. （in Chinese）. doi: 10.3969/j.issn.1001-3997.2018.06.063

[12] L J WANG, ZH G HU, Y Q YU et al. Evaluation of double-sided planetary grinding using diamond wheels for sapphire substrates. Crystals, 8, 262(2018).

[13] [13] 13杨海成， 王银惠， 梁志强， 等. 蓝宝石磨削表面微观形貌特征研究［J］. 新技术新工艺， 2018（3）： 68-72.YANGH CH， WANGY H， LIANGZH Q， et al. Research on sapphire surface microstructure processed by diamond grinding wheel［J］. New Technology & New Process， 2018（3）： 68-72. （in Chinese）

[14] [14] 14张克华， 文东辉， 鲁聪达， 等. 蓝宝石衬底双面研磨的材料去除机理研究［J］. 中国机械工程， 2008， 19（23）： 2863-2866. doi: 10.3321/j.issn:1004-132X.2008.23.022ZHANGK H， WEND H， LUC D， et al. Research on the material removal mechanism of dual-lapping sapphire substrate［J］. China Mechanical Engineering， 2008， 19（23）： 2863-2866. （in Chinese）. doi: 10.3321/j.issn:1004-132X.2008.23.022

[15] S LUO, O SASAKI, Z CHEN et al. Exact surface profile measurement without subtracting dispersion phase through Fourier transform in a white-light scanning interferometer. Applied Optics, 57, 894-899(2018).

[16] Q VO, F Z FANG, X D ZHANG et al. Surface recovery algorithm in white light interferometry based on combined white light phase shifting and fast Fourier transform algorithms. Applied Optics, 56, 8174(2017).

[17] [17] 17张以谟， 井文才， 张红霞， 等. 数字化白光扫描干涉仪的研究［J］. 光学 精密工程， 2004， 12（6）： 560-565. doi: 10.3321/j.issn:1004-924X.2004.06.002ZHANGY M， JINGW C， ZHANGH X， et al. Computerized white light scanning interferometer and the application［J］. Opt. Precision Eng.， 2004， 12（6）： 560-565. （in Chinese）. doi: 10.3321/j.issn:1004-924X.2004.06.002

[18] [18] 18邹文栋， 黄长辉， 欧阳小琴， 等. 合金韧窝断口三维微观形貌的白光相移干涉检测重构及分形表征［J］. 中国机械工程， 2010， 21（22）： 2675-2678. doi: 10.1016/S1875-5372(10)60130-0ZOUW D， HUANGCH H， OUYANGX Q， et al. White light phase-shifting interferometer detection， reconstruction and fractal characterization of alloy dimple fracture 3D microstructure［J］. China Mechanical Engineering， 2010， 21（22）： 2675-2678. （in Chinese）. doi: 10.1016/S1875-5372(10)60130-0

[19] S MA, C QUAN, R ZHU et al. Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry. Optics Communications, 284, 2488-2493(2011).

[20] S LUO, O SASAKI, Z CHEN et al. Utilization of complex-valued signals in a white-light scanning interferometer for accurate measurement of a surface profile. Applied Optics, 56, 4419-4425(2017).

[21] M G KIM, H J PAHK. Fast and reliable measurement of thin film thickness profile based on wavelet transform in spectrally resolved white-light interferometry. International Journal of Precision Engineering and Manufacturing, 19, 213-219(2018).

[22] [22] 22崔长彩， 余卿， 张遨， 等. 金刚石砂轮表面形貌测量系统［J］. 光学 精密工程， 2014， 22（12）： 3167-3174. doi: 10.3788/OPE.20142212.3167CUICH C， YUQ， ZHANGA， et al. Measurement system of surface topography for diamond grinding wheel［J］. Opt. Precision Eng.， 2014， 22（12）： 3167-3174. （in Chinese）. doi: 10.3788/OPE.20142212.3167

[23] A A ARENDS, T M GERMAIN, J F OWENS et al. Simultaneous reflectometry and interferometry for measuring thin-film thickness and curvature. The Review of Scientific Instruments, 89(2018).

[24] [24] 24王生怀， 徐风华， 陈育荣， 等. 一种表面结构多尺度融合测量系统［J］. 中国机械工程， 2018， 29（6）： 705-711， 719. doi: 10.3969/j.issn.1004-132X.2018.06.011WANGSH H， XUF H， CHENY R， et al. A kind of multi-scale integration measurement system for surface textures［J］. China Mechanical Engineering， 2018， 29（6）： 705-711， 719. （in Chinese）. doi: 10.3969/j.issn.1004-132X.2018.06.011

[25] [25] 25中华人民共和国国家质量监督检验检疫总局， 中国国家标准化管理委员会. 中华人民共和国推荐性国家标准： 硅片平坦表面的表面粗糙度测量方法GB/T 29505-2013［S］. 北京： 中国标准出版社， 2014. doi: 10.3969/j.issn.1006-9364.2013.08.001General Administration of Quality Supervision， Inspection and Quarantine of the People's Republic of China， Standardization Administration of the People's Republic of China. National Standard （Recommended） of the People's Republic of China： Test method for measuring surface roughness on planar surfaces of silicon wafer. GB/T 29505-2013［S］. Beijing： Standards Press of China， 2014. （in Chinese）. doi: 10.3969/j.issn.1006-9364.2013.08.001

[26] [26] 26蒋向前. 新一代GPS标准理论与应用［M］. 北京： 高等教育出版社， 2007.JIANGX Q. Theory and Applications of New-generation Geometrical Product Specifications［M］. Beijing： Higher Education Press， 2007. （in Chinese）

[27] E S GADELMAWLA, M M KOURA, T M A MAKSOUD et al. Roughness parameters. Journal of Materials Processing Technology, 123, 133-145(2002).

[28] [28] 28刘泊， 齐兴华， 张明. 表面三维轮廓的粗糙度评定［J］. 光学 精密工程， 2016， 24（10）： 135-140.LIUB， QIX H， ZHANGM. Roughness evaluation of 3D surface profile［J］. Opt. Precision Eng.， 2016. 24（10）： 135-140. （in Chinese）

[29] T GUO, F LI, J P CHEN et al. Multi-wavelength phase-shifting interferometry for micro-structures measurement based on color image processing in white light interference. Optics and Lasers in Engineering, 82, 41-47(2016).

[30] [30] 30张倩， 崔长彩， 周晓林， 等. 垂直扫描白光干涉测量数据处理算法分析［J］. 湖北汽车工业学院学报， 2010， 24（1）： 42-45， 49. doi: 10.3969/j.issn.1008-5483.2010.01.011ZHANGQ， CUICH C， ZHOUX L， et al. Research on vertical scanning white-light interferometric and interferogram processing algorithms［J］. Journal of Hubei Automotive Industries Institute， 2010， 24（1）： 42-45， 49. （in Chinese）. doi: 10.3969/j.issn.1008-5483.2010.01.011