Laser & Optoelectronics Progress, Volume. 48, Issue 12, 123101(2011)
Design of Embedded Wide Spectrum Online Monitoring System of Film Thickness
[3] [3] Wang Haifeng, Huang Guangzhou, Yu Jirong. Study of optical filter film thickness monitoring system based on the method of wideband spectrum scanning[J]. Vacuum Electronics, 2004, (6): 29~31
[5] [5] Liu Xiaoyuan, Huang Yun, Zhou Ningping et al.. The system of the wideband monitoring of optical film thickness[J]. J. National University of Defense Technology, 2001, 23(1): 23~27
[6] [6] Zhou Pengfei, Chen Guilian, Zhang Rongfu. Development the instrument of monitoring the thickness of film by wideband spectrum[J]. Optical Instrument, 2001, 23(6): 35~37
[7] [7] Song Baohua. Linux Device Driver Development Solution[M]. Beijing: Posts & Telecommunication Press, 2008
[8] [8] Zhao Shuli, Liao Ningfang, Tan Boneng. Overall design and data acquisition system of miniature color measuring spectrometer[J]. Optical Technique, 2010, 36(6): 848~851
[9] [9] Robert Love. Linux Kernel Development (3rd ed.)[M]. Chen Lijun Transl.. Beijing: China Machine Press, 2006
[10] [10] Ni Jili. Qt and Linux Programing[M]. Beijing: Electronic Industry Press, 2006
[11] [11] Arthur Griffith. KDE2/Qt Programming Bide[M]. Gao Shoufu Transl.. Beijing: Electronic Industry Press, 2002
Get Citation
Copy Citation Text
Li Chunxi, Deng Huaqiu, Ren Hao. Design of Embedded Wide Spectrum Online Monitoring System of Film Thickness[J]. Laser & Optoelectronics Progress, 2011, 48(12): 123101
Category: Thin Films
Received: Jul. 3, 2011
Accepted: --
Published Online: Oct. 11, 2011
The Author Email: Chunxi Li (lchx0520@163.com)