Laser & Optoelectronics Progress, Volume. 48, Issue 12, 123101(2011)

Design of Embedded Wide Spectrum Online Monitoring System of Film Thickness

Li Chunxi1、*, Deng Huaqiu1, and Ren Hao2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(11)

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    Li Chunxi, Deng Huaqiu, Ren Hao. Design of Embedded Wide Spectrum Online Monitoring System of Film Thickness[J]. Laser & Optoelectronics Progress, 2011, 48(12): 123101

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    Paper Information

    Category: Thin Films

    Received: Jul. 3, 2011

    Accepted: --

    Published Online: Oct. 11, 2011

    The Author Email: Chunxi Li (lchx0520@163.com)

    DOI:10.3788/lop48.123101

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