Fig. 1. Overall design structure diagram of two-dimmensionl calibration platform for detector array

Fig. 2. Schematic diagram of single point scanning track

Fig. 3. Schematic diagram of 3 unit × 3 unit detector array target module scanning track

Fig. 4. Schematic diagram of hardware circuit system

Fig. 5. Flow chart of lower computer software control system

Fig. 6. Schematic diagram of incremental PID closed loop control system

Fig. 7. Step response curve of incremental PID control stepping motor position

Fig. 8. Physical picture of two-dimensional calibration platform control system. (a) Front; (b) Back; (c) Equipment of repeated positioning accuracy experiment; (d) Operation picture

Fig. 9. Repeated positioning error of X-axis

Fig. 10. Repeated positioning error of Y-axis

Fig. 11. A curve of detector unit response value in single point mode test