Fig. 1. Traceable calibration layout for quality control of micro-/nano-positioining stages

Fig. 2. Interferometric calibration setup

Fig. 3. Experimental investigation of the quasi-static performance of the interferometric calibration setup

Fig. 4. Experimental investigation of the z-axis motion performance of the interferometric calibration setup

Fig. 5. Interferometric calibration of a piezostage working in closed-loop mode

Fig. 6. Interferometric calibration of a piezostage working in open-loop mode

Fig. 7. Closed-loop displacement of the piezostage measured by the integrated PicoQ^® Sensor and the interferometer, respectively

Fig. 8. Interferometric calibration for repeatability of the piezostage