[1] [1] HOAG H. Neuroengineering: remote control ［J］. Nature, 2003,423:796-798.

[2] [2] HUMAYUN M S. Intraocular retinal prosthesis ［J］. Transactions of American Ophthalmological Society, 2001,99:271-278.

[3] [3] ZRENNER E. Will retinal implants restore vision ［J］. Science, 2002,295:1022-1025.

[4] [4] STIEGLITZ T, SCHUETTLER M, KOCH K P. Implantable biomedical microsystems for neural prosthesis ［J］. IEEE Engineering in Medicine and Biology Magazine, 2005,24:58-65.

[5] [5] WIGHTMAN R. Probing cellular chemistry in biological systems with microelectrodes ［J］. Science,2006,311:1570-1574.

[6] [6] LOEB G E, BAK M J, SALCMAN M, et al.. Parylene as a chronically stable, reproducible microelectrode insulator ［J］. IEEE Transactions on Biomedical Engineering, 1977,24:121-128.

[7] [7] SCHMIDT E M, MCINTOSH J S, BAK M J. Long-term implants of parylene-C coated microelectrodes［J］. Medical & Biological Engineering & Computing, 1988,26:96-101.

[8] [8] WOLGEMUTH. Assessing the performance and suitability of parylene coating ［J］. Medical Device and Diagnostic Industry, 2000,22:42-49.

[9] [9] LI B, HUI CH, XU A L, et al.. Development and characterization of flexible parylene-based neural microeletrodes ［J］. Transducer and Microsystem, 2007,26:101-102,113. (in Chinese)

[10] [10] ZHOU H B, LI G, ZHANG H, et al.. A simple and low-cost method to fabricate flexible microelectrodes for neural applications ［J］. Opt. Precision Eng., 2007,15(7):1056-1063. (in Chinese)

[11] [11] WU Y B, HOU A ZH, NI H N, et al.. Study of microfabrication process of flexible microelectrode arrays based on parylene ［J］. Semiconductor Technology, 2007,32(12):1018-1020,1036. (in Chinese)

[12] [12] RAJARAMAN S, CHOI S O, SHAFER R H, et al.. Microfabrication technologies for a coupled three-dimensional microelectrode, microfluidic array ［J］. Journal of Micromechanics and Microengineering, 2007,17:163-171.

[13] [13] SUN X N, ZHOU H B, LI G, et al.. Fabrication of a flexible three-dimensional neural microelectrode array ［J］. Opt. Precision Eng., 2008,16(8):1396-1402. (in Chinese)