Optics and Precision Engineering, Volume. 17, Issue 10, 2465(2009)
Microfabrication of multichannel flexible neural microelectrodes
Multichannel flexible neural microelectrodes were designed and fabricated,and their fabrication processes were also studied. A microfabrication technology was introduced to manufacture flexible microelectrodes based on a new flexible substrate material, parylene C, due to its excellent electrical insulating, mechanical and biocompatible properties,and a 36-channel flexible neural microelectrode was fabricated with the arrangement in a 6×6 square grid pattern. The size of microelectrode was Φ150 μm (circular) and 150 μm×150 μm (squre), respectively,and the line width of metal trace was 30 μm. It was found that the microelectrode shows a smooth surface and a distinct outline.A electrtical test indicates that the impedance of microelectrode is only 7 kΩ or so, and it reduceds as frequency increasing, which is an excellent high-pass behavior.Moreover, the microelectrode and a flexible substrate can be integrated by the microfabrication technology.The microelectrode is suitable for the application in retinal prostheses, for it has a good quality and excellent electrical properties.
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XING Yu-mei, HUI Chun, XU Ai-lan, LI Gang, ZHAO Jian-long, REN Qiu-shi. Microfabrication of multichannel flexible neural microelectrodes[J]. Optics and Precision Engineering, 2009, 17(10): 2465
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Received: Oct. 29, 2008
Accepted: --
Published Online: Aug. 31, 2010
The Author Email: Yu-mei XING (ymxing@sjtu.edu.cn)
CSTR:32186.14.