Optics and Precision Engineering, Volume. 18, Issue 1, 162(2010)

Removal of subsurface damage in grinding by magnetorheological finishing

SHI Feng*... DAI Yi-fan, PENG Xiao-qiang and WANG Zhuo |Show fewer author(s)
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    References(12)

    [3] [3] LAMBROPOULOS J C,XU S,FANG T, et al.. Twyman effect mechanics in grinding and microgrinding[J]. Appl. Opt., 1996,35:5704-5713.

    [4] [4] SURATWALA T,WONG L,MILLER P, et al.. Sub-surface mechanical damage distribution during grinding of fused silica[J]. J. Non-cryst. Solids., 2006,352(52-54):5601-5617.

    [5] [5] MENAPACE J A,DAVIS P J,STEELE W A, et al.. MRF applications: measurement of process-dependent subsurface damage in optical materials using the MRF wedge technique[J]. SPIE, 2005,5991:39-49.

    [6] [6] SABIA R, STEVENS H J,VARNER R. Pitting of a glass-ceramic during polishing with cerium oxide[J]. J. Non-cryst. Solids., 1999,249:123-130.

    [7] [7] WANG ZH. Study on the key techniques of subsurface damage in optical fabrication[D]. Changsha:National University of Defense Technology, 2008.

    [8] [8] ERIN J,GOLINI D. Surface interactions between nanodiamonds and glass in Magnetorheological Finishing (MRF)[D]. New York:University of Rochester, 2007.

    [9] [9] HALLOCK B,DUMAS P,SHOREY A, et al.. Recent advances in deterministic, low-cost finishing of sapphire windows[J]. SPIE, 2005,5786:154-164.

    [11] [11] ZHANG F, YU J CH, ZHANG X J, et al.. Magnetorheological finishing technology[J]. Opt. Precision Eng., 1995,7(5):1-7.(in Chinese)

    [12] [12] CARR J W,FEARON E,SUMMERS L J,et al.. Subsurface damage assessment with atomic force microscopy[C]. Lawrence Livermore National Laboratory (LLNL) Report, 1999,April 16:1-4.

    CLP Journals

    [1] Zhang Feng. Research Progress of Magnetorheological Finishing Technology at CIOMP[J]. Laser & Optoelectronics Progress, 2015, 52(9): 92202

    [2] LI Xian-ling. Design of CNC non-contact super-smooth polishing machine for optical components[J]. Optics and Precision Engineering, 2012, 20(4): 719

    [3] XIAO Qiang, CHEN Gang. Effect of Cluster Magnetorheological Finishing Parameters on Subsurface Damage Depth[J]. Acta Photonica Sinica, 2018, 47(1): 124001

    [4] ZHANG Feng. Fabrication and testing of precise off-axis convex aspheric mirror[J]. Optics and Precision Engineering, 2010, 18(12): 2557

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    SHI Feng, DAI Yi-fan, PENG Xiao-qiang, WANG Zhuo. Removal of subsurface damage in grinding by magnetorheological finishing[J]. Optics and Precision Engineering, 2010, 18(1): 162

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    Paper Information

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    Received: Mar. 6, 2009

    Accepted: --

    Published Online: Aug. 31, 2010

    The Author Email: Feng SHI (sf.wind@yahoo.com)

    DOI:

    CSTR:32186.14.

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