Optics and Precision Engineering, Volume. 23, Issue 1, 252(2015)
Vibration-insensitive phase-shifting interferometry based on frequency domain analysis
[4] [4] KINNSTAETTER K, LOHMANN A W, SCHWIDER J, et al.. Accuracy of phase shifting interferometry [J]. Appl. Opt., 1988, 27(24): 5082-5087.
[5] [5] WINGERDEN J, FRANKENA H, SMORENBURG C. Linear approximation for measurement errors in phase shifting interferometry [J]. Appl. Opt., 1991, 30(19): 2718-2729.
[6] [6] DECKL. Vibration-resistant phase-shifting interferometry [J]. Appl. Opt., 1996, 35(34): 6655-6662.
[7] [7] WU X M. Research on vibration-resistance technology for optical interferometry [D]. Nanjing: Nanjing University of Science and Technology, 2001. (in Chinese)
[8] [8] HAO Q, ZHU Q D, HU Y. Random phase-shifting interferometry without accurately controlling or calibrating the phase shifts [J]. Opt. Lett., 2009, 34(8): 1288-1290.
[9] [9] PARK J, KIM S. Vibration-desensitized interferometer by continuousphase shifting with high-speed fringe capturing [J]. Opt. Lett., 2010, 35(1): 19-21.
[10] [10] WANG M, HAO Q, ZHU Q D, et al.. Anti-disturbance phase-shifting interferometry method time-and frequency-domain [J]. Acta Optica Sinica, 2011, 31(10): 1112005. (in Chinese)
[11] [11] XU J CH, XU Q, CHAI L Q. Tilt-shift determination and compensation in phase-shifting interferometry [J]. J. Opt. A: Pure Appl. Opt., 2008, 10: 075011.
[12] [12] LIU Q, WANG Y, JI F, et al.. Phase- and tilt-shift determinations by analysis of spectra sidebands for phase-shift interferometers [J]. Appl. Opt., 2013, 52(31): 7654-7659.
[13] [13] LIU Q, WANG Y, HE J G, et al.. Tilt shift determinations with spatial-carrier phase-shift method in temporal phase-shift interferometry [J]. J. Opt., 2014, 16: 075404.
[14] [14] XU J CH, XU Q, CHAI L Q. Iterative algorithm for phase extraction from interferograms with random and spatially nonuniform phase shifts [J]. Appl. Opt., 2008, 47(3): 480-485.
[15] [15] SU ZH D, SHI ZH G, SU D Q, et al.. Iterative phase shifting algorithm with normalized intensity in the presence of random and tilt phase shifts [J]. Acta Optica Sinica, 2013, 33(1): 0112001. (in Chinese)
[16] [16] ZHAO ZH L, XIA B C, CHEN L H, et al.. Self-correction of phase step error in phase shifting interferometric measurement [J]. Opt. Precision Eng., 2013, 31(5): 1116-1121. (in Chinese)
[17] [17] LIU Q, WANG Y, JI F, et al.. A three-step least-squares iterative method for tilt phase-shift interferometry [J]. Opt. Express, 2013, 21(24): 29505-29515.
[18] [18] HAO Q, ZHU Q D, HU Y, et al.. A light intensity correction method to open annular light intensity monitoring area in the outer interference pattern, China: CN 101482394 B [P]. 2010.
[19] [19] MA D M, SHAO J, JING CH SH, et al.. A assessment method of random error modal for phase-shift interferometer, China: CN 103047928 A [P]. 2013.
[20] [20] RODDIER C, RODDIER F. Interferogram analysis using Fourier transform techniques [J]. Appl. Opt., 1987, 26(9): 1668-1673.
[21] [21] GROOT P D.Measurement of transparent plates with wavelength-tuned phase-shifting interferometry [J]. Appl. Opt., 2000, 39(16): 2658-2663.
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LIU Qian, WANG Yang, JI Fang, HE Jian-guo, ZHANG Lian-xin. Vibration-insensitive phase-shifting interferometry based on frequency domain analysis[J]. Optics and Precision Engineering, 2015, 23(1): 252
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Received: Aug. 20, 2014
Accepted: --
Published Online: Feb. 15, 2015
The Author Email: Qian LIU (liuqianblue@126.com)