[1] [1] WANG P, CHEN Y, XUAN B, et al.. Polishing large aperture mirrors by manipulator ［J］. Opt. Precision Eng., 2010, 18(5): 1077-1085. (in Chinese)

[2] [2] WANG Y G, CUI T G, MA W SH, et al.. Removal function for fabrication of WolterⅠ grazing mirror by elastic ball tool ［J］. Opt. Precision Eng., 2011, 19(1): 10-16. (in Chinese)

[3] [3] LI N, WANG B, JIN H L, et al.. Numerically controlled atmospheric pressure plasma processing of micro-structured optics ［J］. Opt. Precision Eng., 2013, 21(4): 934-940. (in Chinese)

[4] [4] KINNSTAETTER K, LOHMANN A W, SCHWIDER J, et al.. Accuracy of phase shifting interferometry ［J］. Appl. Opt., 1988, 27(24): 5082-5087.

[5] [5] WINGERDEN J, FRANKENA H, SMORENBURG C. Linear approximation for measurement errors in phase shifting interferometry ［J］. Appl. Opt., 1991, 30(19): 2718-2729.

[6] [6] DECKL. Vibration-resistant phase-shifting interferometry ［J］. Appl. Opt., 1996, 35(34): 6655-6662.

[7] [7] WU X M. Research on vibration-resistance technology for optical interferometry ［D］. Nanjing: Nanjing University of Science and Technology, 2001. (in Chinese)

[8] [8] HAO Q, ZHU Q D, HU Y. Random phase-shifting interferometry without accurately controlling or calibrating the phase shifts ［J］. Opt. Lett., 2009, 34(8): 1288-1290.

[9] [9] PARK J, KIM S. Vibration-desensitized interferometer by continuousphase shifting with high-speed fringe capturing ［J］. Opt. Lett., 2010, 35(1): 19-21.

[10] [10] WANG M, HAO Q, ZHU Q D, et al.. Anti-disturbance phase-shifting interferometry method time-and frequency-domain ［J］. Acta Optica Sinica, 2011, 31(10): 1112005. (in Chinese)

[11] [11] XU J CH, XU Q, CHAI L Q. Tilt-shift determination and compensation in phase-shifting interferometry ［J］. J. Opt. A: Pure Appl. Opt., 2008, 10: 075011.

[12] [12] LIU Q, WANG Y, JI F, et al.. Phase- and tilt-shift determinations by analysis of spectra sidebands for phase-shift interferometers ［J］. Appl. Opt., 2013, 52(31): 7654-7659.

[13] [13] LIU Q, WANG Y, HE J G, et al.. Tilt shift determinations with spatial-carrier phase-shift method in temporal phase-shift interferometry ［J］. J. Opt., 2014, 16: 075404.

[14] [14] XU J CH, XU Q, CHAI L Q. Iterative algorithm for phase extraction from interferograms with random and spatially nonuniform phase shifts ［J］. Appl. Opt., 2008, 47(3): 480-485.

[15] [15] SU ZH D, SHI ZH G, SU D Q, et al.. Iterative phase shifting algorithm with normalized intensity in the presence of random and tilt phase shifts ［J］. Acta Optica Sinica, 2013, 33(1): 0112001. (in Chinese)

[16] [16] ZHAO ZH L, XIA B C, CHEN L H, et al.. Self-correction of phase step error in phase shifting interferometric measurement ［J］. Opt. Precision Eng., 2013, 31(5): 1116-1121. (in Chinese)

[17] [17] LIU Q, WANG Y, JI F, et al.. A three-step least-squares iterative method for tilt phase-shift interferometry ［J］. Opt. Express, 2013, 21(24): 29505-29515.

[18] [18] HAO Q, ZHU Q D, HU Y, et al.. A light intensity correction method to open annular light intensity monitoring area in the outer interference pattern, China: CN 101482394 B ［P］. 2010.

[19] [19] MA D M, SHAO J, JING CH SH, et al.. A assessment method of random error modal for phase-shift interferometer, China: CN 103047928 A ［P］. 2013.

[20] [20] RODDIER C, RODDIER F. Interferogram analysis using Fourier transform techniques ［J］. Appl. Opt., 1987, 26(9): 1668-1673.

[21] [21] GROOT P D.Measurement of transparent plates with wavelength-tuned phase-shifting interferometry ［J］. Appl. Opt., 2000, 39(16): 2658-2663.