Fig. 1. SEM images and particle size distribution of ND abrasive grains after agglomeration in NaCl solution of different concentrations

Fig. 2. SEM image of initial nanodiamond abrasive grains

Fig. 3. Schematic diagram of tribology experiment

Fig. 4. Three-dimensional morphology of wear tracks on fused silica surfaces under various agglomerated abrasive particles conditions

Fig. 5. Typical cross-section line profile of wear tracks and material removal rate of fused silica surface under various agglomerated abrasive particles conditions

Fig. 6. Typical cross-section line profile of wear tracks and material removal rate of fused silica surface under various NaCl concentrations

Fig. 7. Steady-state friction coefficient as a function of agglomerated abrasive grains under various load conditions

Fig. 8. Optical microscopy images of wear tracks on fused silica surface

Fig. 9. Scanning electron microscopy images and EDS of wear tracks on fused silica surface without cleaning wear debris

Fig. 10. Optical microscopy images of subsurface damage of fused silica and nano hardness of surface after friction test

Fig. 11. Comparison of material removal rates between MRF and tribological experiment with an applied load of 1 N