Optics and Precision Engineering, Volume. 26, Issue 8, 1960(2018)
Low temperature deposition and photoluminescence properties of silicon oxide multilayer films
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LI Yun, ZHANG Bo-hui, GAO Dong-ze, CONG Ri-dong, YU Wei, LU Wan-bing. Low temperature deposition and photoluminescence properties of silicon oxide multilayer films[J]. Optics and Precision Engineering, 2018, 26(8): 1960
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Received: Dec. 6, 2017
Accepted: --
Published Online: Oct. 2, 2018
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