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Acta Optica Sinica, Volume. 10, Issue 7, 599(1990)

CARS investigation on dissociation kinetics of silane during radiofrequency discharge

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. CARS investigation on dissociation kinetics of silane during radiofrequency discharge[J]. Acta Optica Sinica, 1990, 10(7): 599

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    Paper Information

    Category: Spectroscopy

    Received: Dec. 28, 1989

    Accepted: --

    Published Online: Nov. 12, 2007

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology