Acta Photonica Sinica, Volume. 40, Issue 10, 1526(2011)

Linearity Analysis on Bellows Actuator of a Fine Objective Lens

YUAN Wen-quan*... GONG Yan, ZHANG Wei, WANG Xue-liang, NI Ming-yang and ZHAO Lei |Show fewer author(s)
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    References(16)

    [1] [1] DAVIES R. Adaptive optics: Observations and prospects for studies of active Galactic Nuclei[J]. New Astronomy Reviews, 2008, 52(6): 307-322.

    [6] [6] MICHAEL F M, DAVID G T, DANIEL N G. Apparatus, system, and method for precision positioning and alignment of a lens in an optical system: US, 6760167[P]. 2004-07-06.

    [7] [7] FERNAND B, MAURICE B, DANIEL T. Control of a planar fine positioned actuated by metal bellows[J]. Automatica, 1994, 30(11): 1677-1691.

    [8] [8] PRELLE C, JUTARD A, BETEMPS M. Compliance adjustment of a metal bellows actuator by control law parameters[J]. Mechatronics, 2001, 11(6): 631-647.

    [9] [9] KENJI K, TAKESHI A, KOTARO T, et al. Development of coarse/fine dual stage using pneumatically driven bellows actuator and cylinder with air bearings[J]. Precision Engineering, 2010, 34(3): 526-533.

    [10] [10] HU Liang. Method and application of U-shaped bellows stiffness calculation[J]. Journal of Shanghai University(natural science), 1995, 1(1): 26-35.

    [11] [11] HU Chang-ying, WANG Zhi-wei. Integral equations, iterative algorithm of U-shaped bellows at a large deflection[J]. Chinese Journal of Applied Mechanics, 2001, 18(1): 19-26.

    [12] [12] WANG Yong-gang, DAI Shi-liang, LU Ying-min. Nonlinear analysis on bellows of oil tank[J]. Chinese Journal of Applied Mechanics, 2002, 19(3): 35-39.

    [13] [13] KANG H W, LEE I H, CHO D W. Developmet of a micro-bellows actuator using micro-stereolithography technology[J]. Microelectronic Engineering, 2006, 83: 1201-1204.

    [15] [15] YANG Yi-jun, WANG Xin-feng. Nonlinear finite element analysis of the multiply bellows[J]. Journal of Pressure Equipment and Systems, 2003, 20(9): 13-16.

    [16] [16] CHEN Ye, LI Yong-sheng, GU Bo-qin, et al. The finite element analysis to the U-shape bellows by the ANSYS program[J]. Journal of Pressure Equipment and Systems, 2000, 17(3): 34-36 .

    [17] [17] ZHANG Bing, WANG Xing-feng. Stability of bellows analysis with nonlinear finite element method[J]. Journal of Pressure Equipment and Systems, 2001, 18(1): 40-44.

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    YUAN Wen-quan, GONG Yan, ZHANG Wei, WANG Xue-liang, NI Ming-yang, ZHAO Lei. Linearity Analysis on Bellows Actuator of a Fine Objective Lens[J]. Acta Photonica Sinica, 2011, 40(10): 1526

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    Paper Information

    Received: Jan. 25, 2011

    Accepted: --

    Published Online: Nov. 9, 2011

    The Author Email: Wen-quan YUAN (yuanwenquan@tom.com)

    DOI:10.3788/gzxb20114010.1526

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