Fig. 1. Structure diagram of two-axis FSM

Fig. 2. Structural form of flexure hinge

Fig. 3. Simplified model of two-axis FSM

Fig. 4. Block diagram of FSM control system

Fig. 5. Simulink simulation model of FSM

Fig. 6. Parameter setting graphical user interface (GUI) for simulation model of FSM

Fig. 7. Transfer function curves of open-loop and closed-loop of system

Fig. 8. Rejection curves for linear vibration on foundation support

Fig. 9. Power spectral density of linear acceleration

Fig. 10. Angular position signal of FSM with vibration

Fig. 11. Angular position signal of FSM under random vibration test