Optics and Precision Engineering, Volume. 31, Issue 18, 2656(2023)

Sensitivity laws and prediction of piezoelectric force sensors at different loading points

Jun ZHANG... Tiantian ZHEN*, Jiale CAI, Mengtong LI and Yuting LIU |Show fewer author(s)
Author Affiliations
  • State Key Laboratory of High-Performance Precision Manufacturing,Dalian University of Technology, Dalian116000, China
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    Figures & Tables(16)
    Structure of eight-pivot piezoelectric
    Schematic diagram of the force geometry of dynamometer
    Schematic diagram of main loading point
    Experimental device and signal transmission process
    Schematic diagram of sensitivity experimental
    Schematic diagram of lateral loading point
    Schematic diagram of lateral loading point
    Flowchart of changed position sensitivity prediction
    Prediction of main direction sensitivity
    Prediction of lateral direction sensitivity
    Prediction deviation and standard deviation of sensitivity
    • Table 1. Sensitivity of dynamometer with changed position

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      Table 1. Sensitivity of dynamometer with changed position

      Coordinate/mm-100-50050100
      1003.983.743.853.863.82
      503.883.943.833.813.80
      03.843.843.923.823.82
      -503.883.893.873.793.79
      -1003.833.813.843.783.76
    • Table 2. Sensitivity of dynamometer with changed position

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      Table 2. Sensitivity of dynamometer with changed position

      Loading positionX1X2X3X4X5
      Sensitivity/(mV·N-17.827.998.088.178.29
    • Table 3. Sensitivity of dynamometer with changed position

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      Table 3. Sensitivity of dynamometer with changed position

      Loading position"Y1Y2Y3Y4Y5
      Sensitivity/(mV·N-17.978.067.817.907.88
    • Table 4. Calculation error and standard deviation of sensitivity

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      Table 4. Calculation error and standard deviation of sensitivity

      Loading directionXYZ
      Computational error /%8.69.312.4
      Standard deviation of the error1.861.772.61
    • Table 5. Prediction deviation and standard deviation of sensitivity

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      Table 5. Prediction deviation and standard deviation of sensitivity

      Optimization methodGAACOGWO
      e/%σe/%σe/%σ
      X5.132.803.762.632.721.03
      Y3.203.056.807.131.972.12
      Z0.610.370.860.470.470.25
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    Jun ZHANG, Tiantian ZHEN, Jiale CAI, Mengtong LI, Yuting LIU. Sensitivity laws and prediction of piezoelectric force sensors at different loading points[J]. Optics and Precision Engineering, 2023, 31(18): 2656

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Mar. 22, 2023

    Accepted: --

    Published Online: Oct. 12, 2023

    The Author Email: ZHEN Tiantian (ztt18941194009@163. com)

    DOI:10.37188/OPE.20233118.2656

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