Acta Optica Sinica, Volume. 3, Issue 6, 541(1983)

The stresses and photoelastic effects in GaAs GaAlAs multilayer wafers with masked and selective thermal oxidation structure

LIU HONGDU, FENG ZHECHUAN, and GUO CHANGZI
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    LIU HONGDU, FENG ZHECHUAN, GUO CHANGZI. The stresses and photoelastic effects in GaAs GaAlAs multilayer wafers with masked and selective thermal oxidation structure[J]. Acta Optica Sinica, 1983, 3(6): 541

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    Paper Information

    Category: Materials

    Received: Jan. 6, 1982

    Accepted: --

    Published Online: Sep. 15, 2011

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