Optics and Precision Engineering, Volume. 16, Issue 5, 809(2008)

Studv on mechanical characteristics of aerostatic bearing with finite volume method

[in Chinese] and [in Chinese]
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    References(3)

    [2] [2] SCHATTENBURG M L,SMITH H I.The critical role of metrology in nanotechnology[C].SPIE,2002,46(8):116-124.

    [3] [3] DAI G,POHLENZ F,DANZEBRINK H U,et al..Improving the performance of interferometers in metrological scanning probe microscopes[J].Measurement Science Technology,2004,15(3):444-450.

    [4] [4] TOPCU S,CHASSAGNE L.Heterodyne interferometric technique for displacement control at the nanometric scale[J].Review of Scientific Instruments,2003(11):4876-4880.

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    [in Chinese], [in Chinese]. Studv on mechanical characteristics of aerostatic bearing with finite volume method[J]. Optics and Precision Engineering, 2008, 16(5): 809

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    Paper Information

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    Received: Feb. 14, 2008

    Accepted: --

    Published Online: Aug. 17, 2008

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