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Laser & Optoelectronics Progress, Volume. 58, Issue 1, 123001(2021)

Low-Cost Two-Dimensional Laser Scanning Projection Technology

Cheng Jin1, Zhou Shun1, Xu Naitao1,2, Lu Anjiang3, and Liu Weiguo1
Author Affiliations
  • 1School of Photoelectric Engineering, Xi''an Technological University, Xi''an, Shaanxi 710021, China
  • 2China Key System & Integrated Circuit Co., Ltd, Wuxi, Jiangsu 214101, China
  • 3College of Big Data and Information Engineering, Guizhou University, Guiyang, Guizhou 550025, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (10)
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    References (18)
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    MEMS laser projection module. (a) Actual scanning module; (b) two-dimensional MEMS scanning micromirror chip

    Fig. 1. MEMS laser projection module. (a) Actual scanning module; (b) two-dimensional MEMS scanning micromirror chip

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    Structure of two-dimensional MEMS scanning device

    Fig. 2. Structure of two-dimensional MEMS scanning device

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    Structure of one-dimensional electrostatic MEMS scanning micromirror

    Fig. 3. Structure of one-dimensional electrostatic MEMS scanning micromirror

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    Rotational resonance mode of MEMS scanning micromirror under different frequencies. （a） 28.186 kHz ;（b） 3.162 kHz

    Fig. 4. Rotational resonance mode of MEMS scanning micromirror under different frequencies. （a） 28.186 kHz ;（b） 3.162 kHz

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    Manufacturing process of MEMS scanning micromirror

    Fig. 5. Manufacturing process of MEMS scanning micromirror

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    Physical images of MEMS scanning micromirror in different directions. (a) X axis; (b) Y axis

    Fig. 6. Physical images of MEMS scanning micromirror in different directions. (a) X axis; (b) Y axis

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    MEMS two-dimensional scanning device module before and after packaging. (a) Before packaging; (b) after packaging

    Fig. 7. MEMS two-dimensional scanning device module before and after packaging. (a) Before packaging; (b) after packaging

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    Relationship between voltage and optical angle. (a) X axis; (b) Y axis

    Fig. 8. Relationship between voltage and optical angle. (a) X axis; (b) Y axis

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    Optical angle test equipment and Lissajous pattern

    Fig. 9. Optical angle test equipment and Lissajous pattern

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    • Table 1. Key parameters of MEMS scanning micromirror

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      Table 1. Key parameters of MEMS scanning micromirror

      StructureX-axisY-axis
      Chip size/mm×mm×mm4.7×2.2×0.54.7×5.1×0.5
      Mirror size/mm×mm1.2×1.02.9×2.2
      Finger number140400
      Finger gap/μm55
      Finger width/μm55
      Finger thickness/μm4545
      Finger length/μm150300
      Torsional beam/μm×μm580×50400×40
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    Cheng Jin, Zhou Shun, Xu Naitao, Lu Anjiang, Liu Weiguo. Low-Cost Two-Dimensional Laser Scanning Projection Technology[J]. Laser & Optoelectronics Progress, 2021, 58(1): 123001

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    Paper Information

    Category: Optical Devices

    Received: May. 3, 2020

    Accepted: --

    Published Online: Jan. 28, 2021

    The Author Email:

    DOI:10.3788/LOP202158.0123001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology