Laser & Optoelectronics Progress, Volume. 58, Issue 7, 0712002(2021)
Improved Least Common Multiple Effective Wavelength Method Used in Dual-Wavelength Interferometry
Figures & Tables(6)
Fig. 4. Multi-wavelength simultaneous phase shifting micro-interferometer. (a) Principle diagram; (b) physical picture; (c) color interferogram (red and green lights)
Fig. 5. Measurement results of 1.2 μm metal single groove pattern by different methods
Table 1. Computational performance comparison between look-up table method and proposed method
View tableTable 1. Computational performance comparison between look-up table method and proposed method
Method Parameter Value Look-up table method Dot pitch /nm 0.5 0.2 0.1 Maximum error /nm 0.5 0.4 0.5 Cost time /s 29.8 82 189.1 Proposed method Maximum error /nm 0.45 Cost time /s 0.2
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Xiaoting Guo, Xiaojun Liu, Zili Lei, Wenjun Yang, Long Xu. Improved Least Common Multiple Effective Wavelength Method Used in Dual-Wavelength Interferometry[J]. Laser & Optoelectronics Progress, 2021, 58(7): 0712002
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Jul. 28, 2020
Accepted: Sep. 3, 2020
Published Online: Apr. 25, 2021
The Author Email: Guo Xiaoting (hor2ld@hust.edu.cn), Xu Long (xulong@hust.edu.cn)
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