Fig. 1. Placement of calibration samples in large-size coating

Fig. 2. GIXR measured curves of W/Si multilayers. (a) Length direction; (b) width direction

Fig. 3. GIXR measured and fitted results of W/Si multilayers

Fig. 4. Uniformity of W/Si multilayers. (a) Length direction; (b) width direction

Fig. 5. GIXR measured curves of Ru/C multilayers. (a) Length direction; (b) width direction

Fig. 6. GIXR measured and fitted results of Ru/C multilayers

Fig. 7. Uniformity of Ru/C multilayers. (a) Length direction; (b) width direction

Fig. 8. Measured results of surface morphologies. (a) W/Si multilayers; (b) Ru/C multilayers; (c) PSD curves

Fig. 9. X-ray scattering measurement results of W/Si multilayers and Ru/C multilayers

Fig. 10. Reflectivity curve and fitted result at 8.04 keV energy point. (a) W/Si multilayers; (b) Ru/C multilayers

Fig. 11. Surface morphology image of mirror

Fig. 12. Double-channel multilayer mirror with length of 350 mm

Fig. 13. Calculated reflectivity of W/Si multilayers and Ru/C multilayers in mirror. (a) W/Si multilayers; (b) Ru/C multilayers