Semiconductor Optoelectronics, Volume. 44, Issue 4, 580(2023)

Preparation of Multi-Band High Reflectivity Ag-Based Films Based on Nanolaminate Protection Layers

SU Zhi1...2, HE Wenyan2, WEI Ming2 and WANG Changjun2,* |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(16)

    [1] [1] Schwinde S, Shestaeva S, Holzlohner R, et al. Development of advanced silver coatings for telescope mirrors[J]. Proc. of SPIE, 2022, 21288: 21288X.

    [2] [2] Abbas N, Hussain M, Zahra N, et al. Optimization of Cr seed layer effect for surface roughness of As-deposited silver film using electron beam deposition method[J]. J. of the Chemical Society of Pakistan, 2020, 42(1): 23-30.

    [3] [3] Folgner K A, Chu C T, Sitzman S D, et al. Development and growth of corrosion features on protected silver mirrors during accelerated environmental exposure[J]. Appl. Opt., 2020, 59(5): A187-A197.

    [4] [4] Wu H Y, Huang S R, Shih C H, et al. Highly reflective silver-enhanced coating with high adhesion and sulfurization resistance for telescopes[J]. Nanomaterials (Basel), 2022, 12(7): 1054.

    [5] [5] Shi Q W, Aziz I, Ciou J H, et al. Al2O3/HfO2 nanolaminate dielectric boosting IGZO-based flexible thin-film transistors[J]. Nano-Micro Lett., 2022, 14: 195.

    [6] [6] Cho Y N, Huang J, Ahles C F, et al. Inherent selective pulsed chemical vapor deposition of amorphous hafnium oxide/titanium oxide nanolaminates[J]. Appl. Surface Science, 2022, 600(30): 154010.

    [7] [7] Niu X S, Jiao H F, Ma B, et al. HfO2/SiO2 nanolaminate-based composites prepared by ion beam sputtering for low-loss optics[J]. Optical Eengin., 2022, 61(3): 031202.

    [8] [8] Merisalu M, Aarik L, Kozlova J, et al. Al alloy protection via ultra-thin ceramic coatings and different surface pretreatments[J]. Surface & Coatings Technol., 2022, 435(15): 128240.

    [9] [9] Huang C X, Liu Y Y, Ma D G, et al. High performance of InGaZnO TFTs using HfxAlyOz nanolaminates as gate insulators prepared by ALD[J]. Coatings, 2022, 12(12):1811.

    [10] [10] Bulkin P, Chapon P, Daineka D, et al. PECVD SiNx thin films for protecting highly reflective silver mirrors: Are they better than ALD AlOx films?[J]. Coatings, 2021, 11(7): 771.

    [11] [11] Kurapati R, Maurice V, Seyeux A, et al. Advanced protection against environmental degradation of silver mirror stacks for space application[J]. J. of Materials Science & Technol., 2021, 64: 1-9.

    [12] [12] Nasim M, Li Y, Wen M, et al. A review of high-strength nanolaminates and evaluation of their properties[J]. J. of Materials Science & Technol., 2020, 50: 215-244.

    [13] [13] Tarek A H J, Lai C W, Abd Razak B, et al. Physical vapour deposition of Zr-based nano films on various substrates: A review[J]. Current Nanoscience, 2022, 18(3): 347-366.

    [14] [14] Schwinde S, Schurmann M, Kaiser N, et al. Investigation of SiO2-Al2O3 nanolaminates for protection of silver reflectors[J]. Appl. Opt., 2017, 56(4): C41-C46.

    [15] [15] Pu Y T, Qiao Z, Wang G, et al. Stress reduction and structural properties of Ta2O5/SiO2 mixture films produced by ion-beam sputtering[J]. Proc. of SPIE, 2016, 9683: 968323.

    [17] [17] Fusco M A, Oldham C J, Parsons G A. Investigation of the corrosion behavior of atomic layer deposited Al2O3/TiO2 nanolaminate thin films on copper in 0.1 M NaCl[J]. Materials, 2019, 12(4): 672.

    Tools

    Get Citation

    Copy Citation Text

    SU Zhi, HE Wenyan, WEI Ming, WANG Changjun. Preparation of Multi-Band High Reflectivity Ag-Based Films Based on Nanolaminate Protection Layers[J]. Semiconductor Optoelectronics, 2023, 44(4): 580

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Apr. 19, 2023

    Accepted: --

    Published Online: Nov. 26, 2023

    The Author Email: Changjun WANG (wangcj@ioe.ac.com)

    DOI:10.16818/j.issn1001-5868.2023041901

    Topics