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Optics and Precision Engineering, Volume. 16, Issue 9, 1577(2008)

Location error analysis of deformable aspheric polishing lap based on PZT actuator

HU Zi-qiang1...2,3,*, LING Ning1, PAN Jun-hua4, RAO Chang-hui1 and JIANG Wen-han1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    HU Zi-qiang, LING Ning, PAN Jun-hua, RAO Chang-hui, JIANG Wen-han. Location error analysis of deformable aspheric polishing lap based on PZT actuator[J]. Optics and Precision Engineering, 2008, 16(9): 1577

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    Paper Information

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    Received: Nov. 13, 2007

    Accepted: --

    Published Online: Feb. 28, 2010

    The Author Email: Zi-qiang HU (hzqls@126.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology