Optics and Precision Engineering, Volume. 16, Issue 9, 1577(2008)
Location error analysis of deformable aspheric polishing lap based on PZT actuator
A Φ100 mm deformable polishing lap consisting of 19 PZT actuators was designed and manufactured to polish a hyperboloid mirror with Φ=350 mm,k=-1.112 155,and R=840 mm.In order to analyze the influence of location error on surface error,the formulas were deduced to calculate the deformation and deformation errors of any points on the lap surface.The surface errors were calculated by finite element method,calculated results show that when the distance from deformable polishing lap to the hyperboloid mirror center L is 120 mm and location error δL is 0,1.0,-0.5,0.5,1.0 mm,the surface error RMS are 0.329,0.454,0.366,0.367,0.461 μm,which increases by 0,38%,10.9%,11.2%,40% respectively.These data given here suggest that the location errors should be controlled less than ±0.5 mm.
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HU Zi-qiang, LING Ning, PAN Jun-hua, RAO Chang-hui, JIANG Wen-han. Location error analysis of deformable aspheric polishing lap based on PZT actuator[J]. Optics and Precision Engineering, 2008, 16(9): 1577
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Received: Nov. 13, 2007
Accepted: --
Published Online: Feb. 28, 2010
The Author Email: Zi-qiang HU (hzqls@126.com)
CSTR:32186.14.