Fig. 1. Reconstruction system model diagram

Fig. 2. Reconstruction system position diagram

Fig. 3. Optical imaging depth of field model

Fig. 4. Experimental flow chart

Fig. 5. Phase method model

Fig. 6. Measurement results of steps. (a) Physical map of step; (b) Three-dimensional topography map of step

Fig. 7. Local mapping reconstruction. (a) Physical picture; (b) Reconstruction of depth of field mapping for objects in depth of field; (c) Reconstruction of depth of field outer mapping for objects in reconstruction depth of field; (d) Reconstruction of depth of field mapping for objects outside depth of field; (e) Reconstruction of depth of field outer mapping for objects outside the field

Fig. 8. Global mapping reconstruction. (a) Global mapping for objects in depth of field; (b) Global mapping for objects outside depth of field

Fig. 9. Relationship between phase and number of shots