Optics and Precision Engineering, Volume. 28, Issue 4, 859(2020)

Parallel chromatic confocal measurement system based on digital micromirror device

ZHANG Yi1... YU Qing1, ZHANG Kun1, CHENG Fang1 and CUI Chang-cai2 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    The chromatic confocal technique has garnered much attention in the field of surface topography measurement due to its high accuracy, resolution, and rapidity of operation. However, the existing chromatic confocal methods are mostly based on single-point measurement, which restricts their measuring efficiencies.To address this shortcoming, parallel chromatic confocal measurement system based on the chromatic confocal technique was proposed and studied in this paper.In this experimental system, DMD was used as an optical beam splitter, a self-developed dispersive tube lens was applied to produce axial dispersion, and a color camera was used as a photoelectric receiving device. A self-developed color conversion algorithm was also used to simultaneously obtain spectral information from multi-confocal-points.Finally, a parallel chromatic confocal measurement experimental platform was constructed, the experimental measurements corresponding to 50 μm high steps and self-made steps were performed, and the surface topography restoration experiments were conducted.The experimental results indicate that the axial measuring range of the system is 300 μm, and the measuring accuracy is able to achieve micron level.Further, as a 3D measurement system, the proposed technique was verified to be capable of reconstructing the surface topography of a coin based on one-shot.

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    ZHANG Yi, YU Qing, ZHANG Kun, CHENG Fang, CUI Chang-cai. Parallel chromatic confocal measurement system based on digital micromirror device[J]. Optics and Precision Engineering, 2020, 28(4): 859

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    Paper Information

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    Received: Nov. 15, 2019

    Accepted: --

    Published Online: Jul. 2, 2020

    The Author Email:

    DOI:10.3788/ope.20202804.0859

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