Fig. 1. (Color online) (a) Three main steps to deposit LMO films on planar and three-dimensional substrates. (b) Galvanostatic discharge plot of a 3D LMO electrode (100 nm thick/AEF = 50) at different C-rates. (c) Performance of the 3D LMO electrodes made by atomic layer deposition regarding state-of-the-art values of thin film electrodes deposited by magnetron sputtering, pulsed laser deposition (PLD), chemical vapor deposition (CVD), and ALD methods. Reproduced with permission^[13], Copyright 2022, Wiley-VCH. (d) Illustration of the HAN fabrication process. (e) Areal energy and power densities of HAN@SnO₂@MnO₂//HAN@SnO₂@PPy asymmetric MSCs measured at different current densities. (f) Performance comparison of MSCs based on HAN nanoelectrodes with some reported MSCs. Reproduced with permission^[14], Copyright 2020, Nature Publishing Group. (g) The working principle of Ni microelectrode. (h) Ragone plots of the Ni–Zn microbattery. Reproduced with permission^[15], Copyright 2021, Wiley-VCH. (i) Comparison of a usual SnO₂ NW electrode (left-hand) with a new design of micropatterned NW electrode (right-hand). Reproduced with permission^[16], Copyright 2022, American Chemical Society.

Fig. 2. (Color online) (a) Schematic showing Li-ion MBs with interdigital patterns of 3D bicontinuous nanoporous NiSn anodes and LiMnO₂ cathodes. (b) Ragone plot of microbattery cells and conventional power technologies. Reproduced with permission^[21], Copyright 2013, Nature Publishing Group. (c) The process sequence to prepare 3D interdigital electrodes dielectric capacitor. (d) SEM and optical microscope of 3D interdigital electrodes dielectric capacitor prepare by photolithography and laser induced. (e) Ragone plot showing high-energy, high-power densities of the 3D interdigital electrodes dielectric capacitor. Reproduced with permission^[22], Copyright 2022, Wiley-VCH. (f) Schematic representation of MnO₂-coated Si microtube electrodes for on-chip MSCs with interdigitated and parallel plate configurations. Reproduced with permission^[23], Copyright 2021, Elsevier. (g) Schematic illustration of the fabrication of 3D MnO₂ NTA-based flexible MSCs. (h) Ragone plot comparing the 3D MnO₂ NTA-based MSCs with other 2D and 3D MSCs. Reproduced with permission^[24], Copyright 2022, Royal Society of Chemistry.

Fig. 3. (Color online) (a) Schematic illustration for preparation of c-NiVS/NiCuP and e-NiVS/NiCuP on Cu wire. (b) Areal and volumetric Ragone plot of the asymmetric device. Reproduced with permission^[29], Copyright 2020, Elsevier. (c) Schematic diagram of the FNSC. Reproduced with permission^[30], Copyright 2022, Wiley-VCH. (d) Schematic diagram of fiber type supercapacitors. Reproduced with permission^[31], Copyright 2022, American Chemical Society.