Optics and Precision Engineering, Volume. 17, Issue 1, 27(2009)

Grazing exit micro X-ray spectrometer and its application to film analysis

YANG Jun1,*... LIU Zhi-guo1, XU Qing2, HAN Dong-yan1, LIN Xiao-yan1, DU Xiao-guang1, Kouichi Tsuji3 and DING Xun-liang1 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3Department of Applied Chemistry, Graduate School of Engineering, Osaka City University, Sugimoto 3-3-138, Sumiyoshi-ku Osaka 558-8585, Japan
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    References(14)

    [1] [1] de BOER D K G. Glancing-incidence x-ray fluorescence of layered materials [J]. Phys. Rev. B, 1991, 44 (2):498-511.

    [2] [2] CLAES M, DE BOKX P,VAN GRIEKEN R. Progress in laboratory grazing emission X-ray fluorescence spectrometry [J]. X-Ray Spectrom, 1999,28(4):224-229.

    [3] [3] KREGSAMER P,STRELI CH,WOBRAUSCHEK P, et al.. Synchrotron radiation-excited glancing incidence XRF for depth profile and thin-film analysis of light elements [J]. X-Ray Spectrom, 1999,28(4),292-296.

    [4] [4] NOMA T,IIDA A. Surface analysis of layered thin films using synchrotron X-ray microbeam combined with grazing-exit condition [J]. Rev. Sci. Instrum., 1999,65(4):837-844.

    [5] [5] DE BOKX P K,KOK CH BAILLLEUL A, et al.. Grazing-emission X-ray fluorescence spectrometry; principles and applications [J]. Spectrochimica Acta Part B,1997,52(7):829-840.

    [6] [6] KUMAKHOV M A,KOMAROV F F. Multiple reflection from surface X-ray optics [J]. Phys. Rep., 1990,191(5):289-350.

    [7] [7] DING X,XIE J D,HE Y J,et al.. X-ray spectrometry using polycapillary X-ray optics and position sensitive detector [J]. Talanta, 2000, 53(1):17-22.

    [8] [8] LIN X Y,LI Y D,JAN G T,et al.. Evaluation of transmitting performance of cylindrical polycapillary [J]. Nuclear Instruments and Methods in Physics Research A, 2007,572(2):729-733.

    [9] [9] YANG J,DING X L,LIANG CH L. A new film analysis method using polycapillary X-ray lens [J]. Applied Surface Science, 2007,253(20):8352-8355.

    [10] [10] SUN T X, DING X L, LIU Z G, et al.. Application of a monolithic polycapillary X-ray lens in EXAFS experiments [J]. Opt. Precision Eng., 2007, 15(12):1810-1814.

    [11] [11] SUN B H,XIANG H W.Studies on MEVVA ion source [J]. Rev. Sci. Instrum., 1998, 69(2):816-818.

    [12] [12] YANG J H,CHENG M F,LUO X D, et al.. Surface properties and microstructure of implanted TiN films using MEVVA ion source [J]. Materials Science and Engineering A,2007,445-446(15):558-562.

    [13] [13] http://www.a-chem.eng.osaka-cu.ac.jp/tsujilab/ge-xrf/

    [14] [14] OKHRIMOVSKVY A,TSUII K. Numerical approach for depth profiling with GE-XRF[J]. X-Ray Spectrom, 2006,35(5):305-311

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    YANG Jun, LIU Zhi-guo, XU Qing, HAN Dong-yan, LIN Xiao-yan, DU Xiao-guang, Kouichi Tsuji, DING Xun-liang. Grazing exit micro X-ray spectrometer and its application to film analysis[J]. Optics and Precision Engineering, 2009, 17(1): 27

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    Paper Information

    Category:

    Received: Apr. 22, 2008

    Accepted: --

    Published Online: Oct. 9, 2009

    The Author Email: Jun YANG (renjun116@mail.bnu.edu.cn)

    DOI:

    CSTR:32186.14.

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