Acta Optica Sinica, Volume. 44, Issue 5, 0522001(2024)
Optimization of Chemical Mechanical Solution for Close-to-Atomic Scale Polishing of 6061 Aluminum Alloy
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Jiang Guo, Haijun Xu, Zhe Yang, Lei Wang, Hongxin Zhao. Optimization of Chemical Mechanical Solution for Close-to-Atomic Scale Polishing of 6061 Aluminum Alloy[J]. Acta Optica Sinica, 2024, 44(5): 0522001
Category: Optical Design and Fabrication
Received: Oct. 27, 2023
Accepted: Dec. 13, 2023
Published Online: Mar. 19, 2024
The Author Email: Guo Jiang (guojiang@dlut.edu.cn)