Acta Optica Sinica, Volume. 44, Issue 5, 0522001(2024)

Optimization of Chemical Mechanical Solution for Close-to-Atomic Scale Polishing of 6061 Aluminum Alloy

Jiang Guo1,2、*, Haijun Xu1, Zhe Yang1, Lei Wang3, and Hongxin Zhao3
Author Affiliations
  • 1State Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, Liaoning , China
  • 2NingBo Institute of Dalian University of Technology, Ningbo 315000, Zhejiang , China
  • 3Aviation Industry Corporation of China Beijing Precision Engineering Institute for Aircraft Industry, Beijing 100076, China
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    Jiang Guo, Haijun Xu, Zhe Yang, Lei Wang, Hongxin Zhao. Optimization of Chemical Mechanical Solution for Close-to-Atomic Scale Polishing of 6061 Aluminum Alloy[J]. Acta Optica Sinica, 2024, 44(5): 0522001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Oct. 27, 2023

    Accepted: Dec. 13, 2023

    Published Online: Mar. 19, 2024

    The Author Email: Guo Jiang (guojiang@dlut.edu.cn)

    DOI:10.3788/AOS231706

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