Optics and Precision Engineering, Volume. 28, Issue 4, 817(2020)

Design of high-accuracy laser beam collimation system

ZHU Fan... LI Ying-xian and TAN Jiu-bin |Show fewer author(s)
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    To further improve the accuracy of laser-beam linear datum, a high-accuracy laser collimation system based on a high resolution and high frequency response beam stabilizer and a two-point beam drift separation method was established in this study. First, the translation mirror-based beam stabilizer of the system was studied, and its beam deflection principle and influence factor were analyzed in addition with the two-point beam drift separation method. Then, the resolution and deflection ranges of beam stabilizer, the nonlinearity and hysteresis of piezo, and the associated frequency response were tested. Finally, experimental tests were conducted to determine the accuracy of the laser collimation system. Experimental results indicate that a resolution of 5 nrad of the beam stabilizer can be achieved in deflection range of 120 μrad with frequency response higher than 2 kHz. Furthermore, accuracies of 1.9×10-8 rad and 2.1×10-8 rad of the laser-beam collimation system in 2D directions are obtained, which are both 3 times higher than those corresponding to existing technology. The investigated system is, therefore, capable of satisfying the high accuracy requirements of linear datum using laser-beam.

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    ZHU Fan, LI Ying-xian, TAN Jiu-bin. Design of high-accuracy laser beam collimation system[J]. Optics and Precision Engineering, 2020, 28(4): 817

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    Paper Information

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    Received: Oct. 30, 2019

    Accepted: --

    Published Online: Jul. 2, 2020

    The Author Email:

    DOI:10.3788/ope.20202804.0817

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