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Optics and Precision Engineering, Volume. 28, Issue 4, 800(2020)

Full-field heterodyne short coherent topography measurement technology

L Tong1...2, ZHANG Wen-xi1,2, L Xiao-yu1, LI Yang1,2, WU Zhou1 and KONG Xin-xin1 |Show fewer author(s)
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    L Tong, ZHANG Wen-xi, L Xiao-yu, LI Yang, WU Zhou, KONG Xin-xin. Full-field heterodyne short coherent topography measurement technology[J]. Optics and Precision Engineering, 2020, 28(4): 800

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    Received: Dec. 25, 2019

    Accepted: --

    Published Online: Jul. 2, 2020

    The Author Email:

    DOI:10.3788/ope.20202804.0800

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology