Optics and Precision Engineering, Volume. 28, Issue 4, 800(2020)

Full-field heterodyne short coherent topography measurement technology

L Tong1...2, ZHANG Wen-xi1,2, L Xiao-yu1, LI Yang1,2, WU Zhou1 and KONG Xin-xin1 |Show fewer author(s)
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  • 2[in Chinese]
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    To satisfy the requirements of micron-level measurement accuracy and second-level measurement time in industrial detection, this study proposes a full-field heterodyne short coherent topography measurement scheme. A light source with short coherence is developed to achieve long stride measurement and save scanning time. This study uses full-field heterodyne technology to achieve fast inversion of interference contours, and suppresses the effects of vibration and DC noise on measurement accuracy to improve the efficiency of data inversion. Furthermore, an experimental verification system was set up, and the detection time of the system was verified to be less than 10 s with measurement accuracy superior to 2 μm. The measurement time achieved by the system could be improved to less than 5 s with micron-level measurement accuracy by further optimizing the design. Therefore, the proposed technology was verified to be capable of satisfying the measurement requirements in industrial detection with the advantages of faster measurement speed and higher measurement accuracy compared to existing methods, and has prospective applications in the field of highly efficient industrial detection.

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    L Tong, ZHANG Wen-xi, L Xiao-yu, LI Yang, WU Zhou, KONG Xin-xin. Full-field heterodyne short coherent topography measurement technology[J]. Optics and Precision Engineering, 2020, 28(4): 800

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    Paper Information

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    Received: Dec. 25, 2019

    Accepted: --

    Published Online: Jul. 2, 2020

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    DOI:10.3788/ope.20202804.0800

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