Journal of Terahertz Science and Electronic Information Technology , Volume. 20, Issue 10, 1101(2022)
Gamma radiation induced degradation effect of MEMS capacitive accelerometer's micro-sensing part
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XU Wei, YANG Jie, LIU Minqiang. Gamma radiation induced degradation effect of MEMS capacitive accelerometer's micro-sensing part[J]. Journal of Terahertz Science and Electronic Information Technology , 2022, 20(10): 1101
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Received: Oct. 22, 2020
Accepted: --
Published Online: Dec. 26, 2022
The Author Email: Wei XU (xw198877@gmail.com.)
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