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Laser & Optoelectronics Progress, Volume. 55, Issue 8, 82204(2018)

Simulation and Driving Performance of AlN-Based MEMS Deformable Mirror

Shao Jian1, Li Qi1, and Yu Hongbin1,2
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    Article index updated:May. 24, 2024

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    Shao Jian, Li Qi, Yu Hongbin. Simulation and Driving Performance of AlN-Based MEMS Deformable Mirror[J]. Laser & Optoelectronics Progress, 2018, 55(8): 82204

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Mar. 7, 2018

    Accepted: --

    Published Online: Aug. 13, 2018

    The Author Email:

    DOI:10.3788/lop55.082204

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology