Laser & Optoelectronics Progress, Volume. 60, Issue 9, 0912002(2023)

Refraction Error Compensation of Transparent Layer in Single-Screen Phase Measuring Deflection

Linfeng Li1,2, Qitai Huang1,2、*, Jianfeng Ren1,2, and Mingyang Hou3
Author Affiliations
  • 1School of Optoelectronic Science and Engineering & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215006, Jiangsu, China
  • 2Key Lab of Advanced Optical Manufacturing Technologies of Jiangsu Province & Key Lab of Modern Optical Technologies of Education Ministry of China, Soochow University, Suzhou 215006, Jiangsu, China
  • 3Beijing Institute of Space Mechanics & Electricity, Beijing 100094, China
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    Liquid crystal displays (LCDs) are used for projection in phase measuring deflection (PMD) surface shape detection. The multilayer transparent structure of the LCD refracts the light path, generating positional deviation errors. The error requires point-to-point correction to improve the final measurement accuracy. In this study, an equivalent transparent layer was modeled based on the LCD multilayer transparent structure, and a corresponding PMD model was established for analysis and compensation for the transparent layer. The standard spherical mirror and flat mirror were detected using a compensation algorithm to PMD. The root-mean-square (RMS) error of the surface shape decreases by 20%-40% compared with that before compensation. The error caused by the refraction effect of the LCD transparent layer in a single-screen PMD can be compensated using the proposed method. The RMS error is decreased, and the detection result is closer to the actual surface error after compensation than before compensation.

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    Linfeng Li, Qitai Huang, Jianfeng Ren, Mingyang Hou. Refraction Error Compensation of Transparent Layer in Single-Screen Phase Measuring Deflection[J]. Laser & Optoelectronics Progress, 2023, 60(9): 0912002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 11, 2022

    Accepted: May. 23, 2022

    Published Online: May. 9, 2023

    The Author Email: Huang Qitai (huangqitai@126.com)

    DOI:10.3788/LOP220962

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