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Chinese Journal of Lasers, Volume. 45, Issue 5, 504002(2018)

Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk

Fang Chao1,2, Xiang Yang1、*, and Qi Keqi1,2
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  • 1[in Chinese]
  • 2[in Chinese]
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    AbstractGet PDF(in Chinese)
    Figures&Tables (11)
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    References (16)
    Cited By (2)
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    Figures & Tables(11)
    Structure of the grating lateral shearing interferometer

    Fig. 1. Structure of the grating lateral shearing interferometer

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    Schematic diagram of optical structure of the grating lateral shearing interferometer

    Fig. 2. Schematic diagram of optical structure of the grating lateral shearing interferometer

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    Structure of spatial filter with two square holes

    Fig. 3. Structure of spatial filter with two square holes

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    Variable spatial filter

    Fig. 4. Variable spatial filter

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    Flow diagram of the principle verification test

    Fig. 5. Flow diagram of the principle verification test

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    Shearing phase shift interferogram along the x direction

    Fig. 6. Shearing phase shift interferogram along the x direction

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    Shearing phase shift interferogram along the y direction

    Fig. 7. Shearing phase shift interferogram along the y direction

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    Phase of the wavefront

    Fig. 8. Phase of the wavefront

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    • Table 1. Main parameters of the system

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      Table 1. Main parameters of the system

      ParameterWavelengthλ /μmNumericalaperture NASize ofdetectorX /mmGratingconstantT /μmNumber ofinterferencefringes NDistancebetweenimage planeand gratingz1 /mmDistancebetweenconvergencepointsd /μmDistancebetween imageplane anddetectorz2/mm
      Value0.63280.1251210010225.3148

    • Table 2. Results of ten wavefront aberration tests

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      Table 2. Results of ten wavefront aberration tests

      Group12345678910
      Measurement result /(10-2λ)3.15953.17083.16593.16103.18423.14913.18623.20723.20993.1632
      Measurement result /nm19.99320.06420.03320.00220.14919.92720.16220.29520.31220.016

    • Table 3. Results of ten wavefront aberration contrast tests

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      Table 3. Results of ten wavefront aberration contrast tests

      Group12345678910
      Measurement result /(10-2λ)3.32673.33833.32093.28233.35233.32083.36243.39783.40853.2551
      Measurement result /nm21.05121.12421.01420.77020.77021.21321.01421.27721.56820.598
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    Fang Chao, Xiang Yang, Qi Keqi. Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk[J]. Chinese Journal of Lasers, 2018, 45(5): 504002

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    Paper Information

    Category: Measurement and metrology

    Received: Nov. 8, 2017

    Accepted: --

    Published Online: May. 2, 2018

    The Author Email: Yang Xiang (xiangy@sklao.ac.cn)

    DOI:10.3788/CJL201845.0504002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology