Opto-Electronic Engineering, Volume. 49, Issue 7, 220032(2022)

Design of terahertz focusing lens based on high-resistivity silicon metasurface

Min Ma1...2,3, Lin Jin2,3, Hua Qin2,3, Jiandong Sun2,3, Lixiang Chen1 and Yunfei Sun1,* |Show fewer author(s)
Author Affiliations
  • 1School of Electronic and Information Engineering, Suzhou University of Science and Technology, Suzhou, Jiangsu 215009, China
  • 2Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, Jiangsu 215123, China
  • 3Key Laboratory of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Key Laboratory of Nanodevices of Jiangsu Province, Suzhou, Jiangsu 215123, China
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    Figures & Tables(10)
    (a) The integration model of an AlGaN/GaN terahertz detector and a metasurface lens; (b) Schematic diagram of phase regulation of metasurface element array; (c) Schematic diagram of terahertz antenna structure
    (a) and (c) show the schematic diagram of single-sided cell structure and its energy distribution; (b) and (d) show the schematic diagram of double-sided cell structure and its energy distribution
    The phase and transmittance curves of the single and double structure of metasurface lens vary with diameter
    The two-dimensional phase distribution of metasurface lens
    (a) The array of single-sided metasurface lens; (b) The array of double-sided metasurface lens
    (a) and (c) show the field intensity distribution on the y-z plane and one-dimensional distribution on the y=0 of a single-sided structure when x =0 ; (b) and (d) are the field intensity distribution on the y-z surface when x=0 and one-dimensional distribution when y=0 of the double-sided metasurface lens; (e) and (g) are the field intensity distribution on the x-y plane and the one-dimensional distribution on y=0 when z=1.026 mm of the single-sided metasurface lens; (f) and (h) are the field intensity distribution on the x-y plane and the one-dimensional distribution on y=0 when z=1.067 mm of the double-sided metasurface lens
    Dispersion characteristics of double-sided metasurface lens
    • Table 1. The detail parameters of unit structure

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      Table 1. The detail parameters of unit structure

      参数单位:mm
      d0.03~0.1
      P0.1
      H0.35
      h00.15
      h10.04
      h20.11
    • Table 2. Design parameters of metasurface lens

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      Table 2. Design parameters of metasurface lens

      参数
      工作频率/THz1
      超表面透镜衬底厚度H/mm0.35
      单面超表面透镜口径Ls/mm3
      双面超表面透镜口径Ld/mm3
      设计焦距f/mm1
    • Table 3. Performance comparison of metasurface lens in terahertz band

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      Table 3. Performance comparison of metasurface lens in terahertz band

      材料及结构工作频率/THz数值孔径焦斑半高宽/μm聚焦效率/%参考文献
      Au:金 ;Cu:铜;Al:铝;BCB:苯并环丁烯
      V形天线(Au)+硅衬底0.750.712701[30]
      V形天线(Cu)+硅衬底1.10.78~0.95165~2062.7~5.2[33]
      方环槽(Al)-介质(BCB)-方环槽(Al)0.840.41(焦斑直径450)(电场增益5.2)[34]
      十字硅交叉3.110.1663024[35]
      硅方柱(双面)2.520.9247.524.2[36]
      硅圆柱(单面)12.5090.58.3 (电场增益6.5)本文工作
      硅圆柱(双面)12.5098.710.8(电场增益7.8)
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    Min Ma, Lin Jin, Hua Qin, Jiandong Sun, Lixiang Chen, Yunfei Sun. Design of terahertz focusing lens based on high-resistivity silicon metasurface[J]. Opto-Electronic Engineering, 2022, 49(7): 220032

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    Paper Information

    Category: Article

    Received: Mar. 31, 2022

    Accepted: --

    Published Online: Aug. 1, 2022

    The Author Email: Sun Yunfei (yfsun@usts.edu.cn)

    DOI:10.12086/oee.2022.220032

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