Acta Photonica Sinica, Volume. 31, Issue 1, 79(2002)

OPTICAL CHARACTERISTICS AND OPTIMUM DESIGN OF OPTRICAL EXICITED SELF-RESONANT POLYSILICON SENSOR

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    References(6)

    [1] [1] Langdom R M.Resonator sensors-a review.J Phys (E):Sci Instrum,1985,18(2):103~113

    [2] [2] Li Bingqian,Wu Haoyang,Zhu Changchun,Liu Junhua.The theoretical analysis on damping characteristics of resonant microbeam in vacuum.Sensors  Actuators (A),1999,70(1):191~194

    [3] [3] Zook J D,Burns D W,Guckel H et al.Characteristics of polysilicon resonant microbeams.Sensors Actuators A,1992,35(1):51~59

    [4] [4] Li Bingqian,Zhu Changchun,Liu Junhua.Electrostatic force affected by space charge layer in submicron and nanometer microstructure.Journal of Micromechanics and Microengineering,1999,9(4):319~323

    [5] [5] Zood J D,Burns D W,Herb W R,et al.Optically excited self-resonant microbeams.Sensors and Actuators A,1996,52(1):92~98

    [6] [6] Lubberts G,Burkey B C,Moser F,et al.Optical properties of phosphorus-doped polycrystalline silicon layers.J Appl Phys,1981,52(11):6670~6678

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    [in Chinese], [in Chinese], [in Chinese]. OPTICAL CHARACTERISTICS AND OPTIMUM DESIGN OF OPTRICAL EXICITED SELF-RESONANT POLYSILICON SENSOR[J]. Acta Photonica Sinica, 2002, 31(1): 79

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    Paper Information

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    Received: Jun. 13, 2000

    Accepted: --

    Published Online: Sep. 18, 2007

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