[1] [1] WANG F,QI X D. High-precision control of a photoelectric grating ruling machine grating heterodyne interferometer ［J］. Laser Technology, 2008,32(5):474-476.(in Chinese)

[2] [2] BAYHXG,GAO J X,QI X D. 10.6 μm laser level output high diffraction efficiency blazed grating developed ［J］. Optoelectronics·Laser,2004,15(10):1137-1140.(in Chinese)

[3] [3] SHI L,HAO D F,QI X D. Latest technological advances in high-precision diffraction grating ruling machine［J］．Chinese Journal of Scientific Instrument, 2001, 22(4)：438-439．(in Chinese)

[4] [4] LI Y H, BAYHXG, QI X D. Development of ultra-precision diamond graver for the diffraction grating ruling［J］. Microfabrication Technology,2006,12:15-17．(in Chinese)

[5] [5] LI Y H. Ultra-precision diamond tools—the diffraction grating characterize knife［J］. Opt. Precision Eng.,1996,4(3): 81-84.(in Chinese)

[6] [6] BAUMBACH T, LBBERT D, GAILHANOU M. Strain relaxation in surface nano-structures studied by X-ray diffraction methods［J］. Materials Science and Engineering, 2000, B69-70: 392-396.

[7] [7] SHI G F,SHI G Q, XU ZH W, et al.. The echelle aluminum pressure deep nanoindentation test［J］. Journal of Mechanical Engineering,2012, 48(20)：26-44.(in Chinese)

[8] [8] OLIVER W C, PHARRR G M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments ［J］. J. Mater Res., 1992, 7(6): 1564-1583.

[9] [9] CAI H B. The tip Pidao characterization of the diffraction grating trough control study ［D］. Changchun: Changchun University of Science and Technology, 2013.(in Chinese)

[10] [10] SHI G F,SHI G Q, ZHANG L L, et al.. Finite element simulation analysis of the diffraction grating mechanical scratching process［J］. Computer Simulation, 2012, 29(5)：103-106.(in Chinese)

[11] [11] SHI G Q,NI K,SONG L S, et al.. Based on mechanical finite element and orthogonal experiment method ruled gratings［J］. Machine Design and Research, 2011, 27(1)：80-82.(in Chinese)