Infrared and Laser Engineering, Volume. 53, Issue 5, 20240059(2024)
Automated interferometry test of high-cleanliness ultra-smooth aspherical surfaces
Figures & Tables(14)
Fig. 5. Stewart stage with backplane. (a) Integrated backplane mounted on the Stewart stage; (b) Aspheric surface mounted on the backplane via a snap-in connector; (c) Aspheric surface, backplane and Stewart stage after installation
Table 1. Parameters of aspheric surface under test
View tableView in ArticleTable 1. Parameters of aspheric surface under test
Parameter Value Radius of curvature/mm 896.826 Conic coefficient −0.9630 Outer diameter/mm 338 Inner diameter/mm 108
Table 2. Parameters of designed compensator
View tableView in ArticleTable 2. Parameters of designed compensator
Surface serials Radius of curvature Thickness/mm Material 1 208.23 mm 13.00 H-K9L 2 −108.36 mm 185.70 3 PLANO 8.00 H-K9L 4 −348.21 mm 838.57
Table 3. Sensitive matrix
View tableView in ArticleTable 3. Sensitive matrix
Aberration ΔX ΔY ΔZ α β Tilt X 12.57 0 0 0 −304.78 Tilt Y 0 12.57 0 304.5 0 Power 0.07 0.07 27.12 16.99 17.90 Astigmatism at 45° 0.06 −0.06 0 −14.11 14.11 Astigmatism at 0° 0 0 0 0 0 Coma_X 6.55 0 0 0 −159.85 Coma_Y 0 6.55 0 159.72 0 Spherical −1.10E-04 −1.09E-04 0.26 −0.66 −0.34
Table 4. Error settings
View tableView in ArticleTable 4. Error settings
Parameter No. 1 2 3 4 5 Misalignment ΔX/mm 0.0548 −0.0332 −0.0910 0.0894 −0.0790 ΔY/mm 0.0154 0.0448 0.0005 −0.0994 −0.0730 ΔZ/mm 0.0676 0.0918 −0.0270 0.0530 0.0678 α/(°) −0.0576 −0.0318 0.0940 −0.0122 −0.0132 β/(°) −0.0292 0.0998 −0.0908 −0.0440 −0.0474 Aberration Tilt X 9.585 −30.771 26.460 14.540 13.464 Tilt Y −17.360 −9.113 28.574 −4.967 −4.941 Power 2.577 4.492 1.451 1.952 2.232 Astigmatism at 45° −0.301 1.347 −0.231 0.301 0.207 Astigmatism at 0° −0.523 0.830 2.254 −0.261 −0.214 Coma X 5.026 −16.137 13.904 7.624 7.066 Coma Y −9.107 −4.781 15.011 −2.602 −2.589 Spherical −4.199E-03 −1.788E-02 −9.320E-02 3.167E-03 8.457E-03
Table 5. Adjust results
View tableView in ArticleTable 5. Adjust results
Parameter No. 1 2 3 4 5 ΔX/mm 0.0513(−0.0035) −0.0381(−0.0049) −0.0986(−0.0076) 0.0890(−0.0004) −0.0804(−0.0014) ΔY/mm 0.0087(−0.0067) 0.0349(−0.0099) 0.0031(+0.0026) −0.0985(+0.0009) −0.0703(+0.0027) ΔZ/mm 0.0675(−0.0001) 0.0916(−0.0002) −0.0269(+0.0001) 0.0533(+0.0003) 0.0678(+0.0000) α/(°) −0.0573(+0.0003) −0.0314(+0.0004) 0.0939(−0.0001) −0.0127(−0.0005) −0.0133(−0.0001) β/(°) −0.0293(−0.0001) 0.0996(−0.0002) −0.0911(−0.0003) −0.0446(−0.0006) −0.0475(−0.0001)
Table 6. Measurement process and results
View tableView in ArticleTable 6. Measurement process and results
Steps Wavefront Zernike coefficients Aberrations (a) Intial state 
PV=8.737RMS=2.017Tilt X=−0.3329Tilt Y=1.6998Power=3.3714Astigmatism at 45°=0.0319Astigmatism at 0°=0.0575Coma X=−0.1968Coma Y=0.8690Spherical=−0.0364 ΔX= −0.027 mmΔY= +0.135 mm (b) After tilt adjustment 
PV=5.691RMS=1.610Tilt X=0.0175Tilt Y=0.0175Power=2.9389Astigmatism at 45°=0.0293Astigmatism at 0°=0.0066Coma X=−0.0136Coma Y=0.0209Spherical=−0.0082 ΔZ= +0.108 mm (c) After defocus adjustment 
PV=0.384RMS=0.064Tilt X=0.0072Tilt Y=−0.0099Power=0.0033Astigmatism at 45°=0.0360Astigmatism at 0°=0.0322Coma X=−0.0993Coma Y=0.0985Spherical=−0.0695 ΔX= −2.7343 mmΔY= −2.7516 mmα= +0.1131°β= −0.1124° (d) After coma adjustment 
PV= 0.261RMS=0.042Tilt X=0.0015Tilt Y=−0.0014Power=0.0018Astigmatism at 45°=0.044Astigmatism at 0°=−0.053Coma X=0.0011Coma Y=−0.0012Spherical=−0.005 ΔX= −0.001 mmΔY= +0.002 mmΔZ= −0.001 mmα= −0.0005°β= −0.0003°
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Ling Li, Jiafu Zhang, Xin Tao, Zongwei Yu, Mengxu Li, Renyuan Wang, Xi Chen, Chengguang Cui, Xiangdong Wang. Automated interferometry test of high-cleanliness ultra-smooth aspherical surfaces[J]. Infrared and Laser Engineering, 2024, 53(5): 20240059
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Received: Feb. 1, 2024
Accepted: --
Published Online: Jun. 21, 2024
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