Optics and Precision Engineering, Volume. 21, Issue 3, 590(2013)

Design and epitaxial growth of quantum-well for 852 nm laser diode

XU Hua-wei1...2,*, NING Yong-qiang1, ZENG Yu-gang1, ZHANG Xing1 and QIN Li1 |Show fewer author(s)
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  • 2[in Chinese]
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    An InAlGaAs/AlGaAs strained quantum-well laser with high temperature stability was designed and grown to overcome the emission wavelength shift occurred in high temperature for a 852 nm laser diode. Based on a comprehensive model, the gains and wavelengths versus the operation temperatures of InAlGaAs, InGaAsP, InGaAs and GaAs quantum-wells were calculated and compared. The results indicate that In0.15Al0.11Ga0.74As quantum-well is the most appropriate candidate for the quantum well of the 852 nm laser diode with the higher gain and better temperature stability simultaneously. Then, Metal-organic Chemical Vapor Deposition(MOCVD) was used to grow compressive-strained In0.15Al0.11Ga0.74As/Al0.3Ga0.7As active region and Reflectance Anisotropy Spectroscopy (RAS) and Photoluminescence Measurements (PL) were applied to the evaluation of crystalline quality for InAlGaAs/AlGaAs interfaces. It is proved that the indium segregation effect can be effectively suppressed by lowering the growth temperature and using the interruption time between InAlGaAs quantum-well and AlGaAs barriers, and an abrupt interface and good crystalline quality for InAlGaAs/AlGaAs quantum-well can be obtained. Finally, an InAlGaAs/AlGaAs strained quantum-well laser was grown with optimized growth conditions. Experimental results indicate that the laser has a Full Width Half Maximum (FWHM) of 1.1 nm, the slope efficiency of 64 W/A and the wavelength shift with temperature of 0.256 nm/K. The theoretical calculation results are in good agreement with experimental results, which verifies that the laser meets the work requirements at a high temperature.

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    XU Hua-wei, NING Yong-qiang, ZENG Yu-gang, ZHANG Xing, QIN Li. Design and epitaxial growth of quantum-well for 852 nm laser diode[J]. Optics and Precision Engineering, 2013, 21(3): 590

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    Paper Information

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    Received: Nov. 17, 2012

    Accepted: --

    Published Online: Apr. 8, 2013

    The Author Email: Hua-wei XU (xuhwciomp@163.com)

    DOI:10.3788/ope.20132103.0590

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