Acta Photonica Sinica, Volume. 35, Issue 10, 1542(2006)

Size Effect of the Optical Properties and the Minimal Continuous Thickness of Copper Films

Fan Ping1...2,*, Shao Jianda2, Yi Kui2, Qi Hongji2 and Fan Zhengxiu2 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(21)

    [1] [1] Shao J D,Yi K,Fan Z X,et al. Chinese J Lasers,1999,A26(12): 1127~1132

    [2] [2] Glichman E,Nathan M. On the unusual electromigration behavior of copper interconnects. J Appl Phys,1996,80(7):3782~3785

    [3] [3] Schneider G,Hambach D,Niemann B,et al. In situ x-ray microscopic observation of the electromigration in passivated Cu interconnects. Appl Phys Lett,2001,78(13):1936~1940

    [4] [4] Du H,Lee S W,Gong J,et al. Size effect of nano-copper films on complex optical constant and permittivity in infrared region. Mater Lett,2004,58(6) :1117~1120

    [5] [5] Johnson P B,Christy R W. Optical constants of the noble metals. Phys Rev,1972,B6(2) :4370~4372

    [6] [6] Paik N. Characteristics of Cu films prepared using a magnetron sputter type negative ion source (MSMIS). Nucl Instrum Methods Phys Res Sect,2005,B229(3-4):436~442

    [7] [7] Shao J D,Yi K,Fan Z X,et al. Chinese J Lasers,1998,A25(4):309~312

    [8] [8] Shao J D,Yi K,Fan Z X,et at. Acta Physica Sinica,1997,46(11):2258~2266

    [9] [9] Zhang D K,Hu X Y,Li T,et al. Acta Photonica Sinica,2004,33(8):982~985

    [10] [10] Evans B L,Xu S. The nucleation and growth of thin films. Proc SPIE,1990,1324 : 90~102

    [11] [11] Xu S,Evans B L. Nucleation and growth of ion beam sputtered metal films. J Mat Sci,1992,27(11) :3108~3117

    [12] [12] Xu S,Evans B L,Flynn D I,et al. The study of island growth of ion beam sputtered metal films by digital image processing. Thin Solid Films,1994,238(1):54~61

    [13] [13] Fan P,Qi H J,Yi K,et al. Journal of Vacuum Science and Technology,2004,24(2):81~85

    [14] [14] Fan P,Shao J D,Yi K,et al. Chinese J Lasers,2005,32(7):977~981

    [15] [15] Shao J D,Fan Z X,Wang R W. Chinese J Lasers,1996,23(10).893~896

    [16] [16] Zhang D W,Hong R J,Fan S H,et al. Acta Photonica Sinica,2005,34(3):477~480

    [17] [17] Zhu Y,Shen W D,Ye H,et al. Acta Photonica Sinica,2005,34(1):154~157

    [18] [18] Fox M. Optical Properties of Solids. New York: Oxford University Press,2001.47~69

    [19] [19] Harris L,Loeb A L. Evaluation and analysis of optical and electrical constants of thin films as functions of relectance and transmission data by electronic digital computation. J Opt Soc Am,1954,45(3) :179~188

    [20] [20] Xue Z Q,Wu Q D,Li H. Physics of Thin Film. Beijing:Electronic Industry Press,1991.20~28

    [21] [21] Wen L S,Huang R F,Guo L F,et al. Microstructure and mechanical properties of metal/ceramic Ti/TiN multilayers.J Magn Magn Mater,1993,126(1~3):200~202

    Tools

    Get Citation

    Copy Citation Text

    Fan Ping, Shao Jianda, Yi Kui, Qi Hongji, Fan Zhengxiu. Size Effect of the Optical Properties and the Minimal Continuous Thickness of Copper Films[J]. Acta Photonica Sinica, 2006, 35(10): 1542

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jul. 6, 2005

    Accepted: --

    Published Online: Jun. 3, 2010

    The Author Email: Ping Fan (fanping@Szu.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics