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Chinese Optics Letters, Volume. 9, Issue 5, 053101(2011)

Accurate analysis of ellipsometric data for thick transparent f ilms

Yuan Zhao1,2, Mingyu Sheng1,3, Yuxiang Zheng1, and Liangyao Chen1
Author Affiliations
  • 1Department of Optical Science and Engineering, Fudan University, Shanghai 200433, China
  • 2Department of Optical Electronics Information Engineering, Shanghai Second Polytechnic University, Shanghai 201209, China
  • 3Department of Electronics Information Engineering, Shanghai Business School, Shanghai 200235, China
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    Yuan Zhao, Mingyu Sheng, Yuxiang Zheng, Liangyao Chen. Accurate analysis of ellipsometric data for thick transparent f ilms[J]. Chinese Optics Letters, 2011, 9(5): 053101

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    Paper Information

    Category: Thin films

    Received: Sep. 26, 2010

    Accepted: Dec. 10, 2010

    Published Online: Apr. 22, 2011

    The Author Email:

    DOI:10.3788/COL201109.053101

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology