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Bulletin of the Chinese Ceramic Society, Volume. 42, Issue 2, 743(2023)

Influences of In-Situ Annealing and Deposition Temperature of Bottom Electrodes on Properties of PZT Films

WANG Xing1、* and ZOU Helin2
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  • 2[in Chinese]
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    WANG Xing, ZOU Helin. Influences of In-Situ Annealing and Deposition Temperature of Bottom Electrodes on Properties of PZT Films[J]. Bulletin of the Chinese Ceramic Society, 2023, 42(2): 743

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    Paper Information

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    Received: Aug. 17, 2022

    Accepted: --

    Published Online: Mar. 17, 2023

    The Author Email: Xing WANG (wangxing010@126.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology