Optics and Precision Engineering, Volume. 15, Issue 9, 1361(2007)

Experimental study of bending silicon chip with long pulse width laser

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Experimental study of bending silicon chip with long pulse width laser[J]. Optics and Precision Engineering, 2007, 15(9): 1361

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    Received: Jan. 21, 2007

    Accepted: --

    Published Online: Feb. 18, 2008

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