INFRARED, Volume. 41, Issue 5, 35(2020)
Research on High Resolution Grating Precision Positioning System
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LIU Lei, WU Wei, ZHANG Bing, LI Zhi-zeng, SONG Ping. Research on High Resolution Grating Precision Positioning System[J]. INFRARED, 2020, 41(5): 35
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Received: May. 5, 2020
Accepted: --
Published Online: Nov. 11, 2020
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