Infrared and Laser Engineering, Volume. 48, Issue 5, 517001(2019)
Precise capacitance measurement by laser locking Fabry-Perot interferometer
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Wang Jianbo, Qian Jin, Yin Cong, Lu Zuliang, Huang Lu, Yang Yan. Precise capacitance measurement by laser locking Fabry-Perot interferometer[J]. Infrared and Laser Engineering, 2019, 48(5): 517001
Received: Dec. 10, 2018
Accepted: Jan. 17, 2019
Published Online: Jun. 22, 2019
The Author Email: Jianbo Wang (wangjianbo@nim.ac.cn)