Acta Optica Sinica, Volume. 29, Issue 1, 252(2009)
Improvement for Extraction Efficiency of Vertical GaN-Based LED on Si Substrate by Photo-Enhanced Wet Etching
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Zhou Yinhua, Tang Yingwen, Rao Jianping, Jiang Fengyi. Improvement for Extraction Efficiency of Vertical GaN-Based LED on Si Substrate by Photo-Enhanced Wet Etching[J]. Acta Optica Sinica, 2009, 29(1): 252
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