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Semiconductor Optoelectronics, Volume. 41, Issue 2, 211(2020)

Preparation of Blue Light GaN-based Micro-LED Chips and Study on Laser Lift-off Process

WANG Xianchi1... PAN Zhangxu2, LIU Jiucheng2, GUO Chan2, LI Zhicheng1, GONG Yanfen2 and GONG Zheng2 |Show fewer author(s)
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    WANG Xianchi, PAN Zhangxu, LIU Jiucheng, GUO Chan, LI Zhicheng, GONG Yanfen, GONG Zheng. Preparation of Blue Light GaN-based Micro-LED Chips and Study on Laser Lift-off Process[J]. Semiconductor Optoelectronics, 2020, 41(2): 211

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    Received: Dec. 14, 2019

    Accepted: --

    Published Online: Jun. 17, 2020

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2020.02.013

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology