Optics and Precision Engineering, Volume. 18, Issue 1, 69(2010)

Measurement of aspheric surfaces by infrared interferometer

HE Jun1,2、* and CHEN Lei1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(13)

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    [2] [2] GAO H, XIN Q M, LI A M, et al.. Error analysis of interferometric method for aspheric surface testing[J]. Journal of Applied Optics, 1993,14(3):61-64. (in Chinese)

    [3] [3] WYANT J C. Interferometric testing of asphericsurface[J]. SPIE, 1987,816:19-39.

    [4] [4] XUE D L, ZHANG ZH Y, ZHENG L G, et al.. Testing methods for large aperture convex SiC asphere mirror[J]. Opt. Precision Eng., 2008,16(12):2491-2496.(in Chinese)

    [5] [5] WYANT J C,BENNETT V P. Computer generated holograms test aspheric optics[J]. Applied Optics, 1992,31(12):2833-2839.

    [6] [6] CHRISTOF P, STEPHAN R. Computer-generated holograms in interferometric testing[J]. Opt. Eng. , 2004,43(11):2534-2540.

    [9] [9] GAO ZH SH, CHEN J B, CHEN L. Use long wavelength(10.6 μm) interferometer to test a torus[J]. SPIE, 1998, 3557:348-352.

    [11] [11] De STEFANO P R,WESTERN A B,STAHL H P,et al.. Design review of infrared phase-shifting interferometer[J]. SPIE, 1992,1779:35-46.

    [12] [12] HE J, WANG Q, CHEN L. Alignment of Twyman-Green infrared phase-shifting interferometer[J]. Infrared and Laser Engineering,2008,37(3):516-520. (in Chinese)

    [13] [13] HE J, WANG Q, GAO ZH S, et al.. The investigation of Twyman phase-shifting CO2 laser interferometer[J]. Infrared and Laser Engineering, 2008,37(supp.):55-59. (in Chinese)

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    HE Jun, CHEN Lei. Measurement of aspheric surfaces by infrared interferometer[J]. Optics and Precision Engineering, 2010, 18(1): 69

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    Paper Information

    Category:

    Received: Apr. 14, 2009

    Accepted: --

    Published Online: Aug. 31, 2010

    The Author Email: Jun HE (hejun-cherry@163.com)

    DOI:

    CSTR:32186.14.

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